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Patents Issued
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Edge Film Removal:
Data Sheet
UVTech's Process Lab is now available to solve your wafer edge cleaning problems
Customer Process Request Form
Process Results Summary
NiPt Film
Removal
Post-CMP
Residue Removal
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WAFER EDGE FILM REMOVAL PROCESS LAB

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SEM Image of edge film removed
490 Boston Post Rd - Sudbury, MA 01776
(978) 440-7282 - david.elliott@uvtechsystems.com
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